Micro-strip spiral resonator in miniaturized inductively coupled plasma source

With the growing demands on MEMS, miniaturized inductively coupled plasma (ICP) sources used in MEMS applications and MEMS fabrication processes have become more important. In order to build a low power and high efficiency ICP, a microstrip spiral resonator with capacitance-in-series structure (structure I) is proposed and analyzed. Resonating frequency tuning method and quality factor adjustment method are discussed according to the analysis. Under consideration of power efficiency, an improvement is made by using a new self-resonating circuit (structure II) which removes series-wound capacitance Ct in structure I. Simulation results show that structure II can achieve higher quality factor and can provide stronger electric field