A novel double-end heating type MEMS microwave power sensor

A novel double-end heating type differential thermal balance MEMS microwave power sensor is presented in this paper. Compared with the traditional single-end heating type microwave power sensors, the novel double-end heating type power sensor has many remarkable advantages because of its thermal symmetry. The matching characteristic between coplanar waveguide (CPW) and its two load resistors R1 is then simulated. Lastly, the main characteristic of the unsteady temperature changing process of the CPW load resistors R1 is analyzed when the absorbed microwave power has been converted into heat, and thereby the analytical expressions for the temperature of CPW load resistors R1 and the time constant of the process are obtained