• DocumentCode
    3465357
  • Title

    A novel uncooled a-Si microbolometer for infrared detection

  • Author

    Liu, Xing-Ming ; Han, Lin ; Liu, Li-Tian

  • Author_Institution
    Inst. of Microelectron., Tsinghua Univ., Beijing
  • fYear
    2006
  • fDate
    23-26 Oct. 2006
  • Firstpage
    626
  • Lastpage
    628
  • Abstract
    A new structure uncooled amorphous silicon (a-Si) microbolometer for infrared detection has been fabricated and characterized. Based on polyimide thermal isolation layer and bottom metal reflective structure, the newly presented bolometer has the advantage of low cost, high yield and high performance. The dependence of the temperature coefficient of resistance on operating temperature has been investigated. The results show that at a chopping frequency of 30Hz and a bias voltage of 5V, the maximum detectivity of 1.7 times 108 cmHzfrac12W-1 is achieved
  • Keywords
    bolometers; infrared detectors; microsensors; silicon; 30 Hz; 5 V; Si; infrared detection; metal reflective structure; operating temperature; polyimide thermal isolation layer; temperature coefficient of resistance; uncooled microbolometer; Bolometers; Costs; Electromagnetic wave absorption; Fabrication; Infrared detectors; Polyimides; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0160-7
  • Electronic_ISBN
    1-4244-0161-5
  • Type

    conf

  • DOI
    10.1109/ICSICT.2006.306396
  • Filename
    4098188
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3465357