DocumentCode
3465385
Title
Study of sensing properties to CH4 of Pt/SnO2:Sb thin film gas sensor in pulsing mode
Author
Anisimov, O.V. ; Maksimova, N.K. ; Schogol, S.S. ; Chernykh, R.V. ; Chernikov, E.V.
Author_Institution
V.D. Kuznetsov Siberian Physicotech. Inst., Tomsk State Univ., Russia
fYear
2005
fDate
21-22 Oct. 2005
Firstpage
65
Lastpage
69
Abstract
The resistance-time profiles of Pt/SnO2:Sb thin films sensor of methane during cyclic variation of the working temperature have been studied. The time-period of one cycle was 10-12 min: 2 sec heating up to 400-570°C and 8-10 sec down-heating to 80-150°C. It was demonstrated the electrical and sensing properties of sensors as function of pulsing temperatures, methane concentration and humidity. It was shown that the using pulsing mode decreases the effect of humidity on the response to methane but does not provide the perfect stabilization of sensors parameters at humidity and environment temperatures variation.
Keywords
antimony; gas sensors; humidity; organic compounds; platinum; thin film devices; tin compounds; 10 to 12 min; 2 sec; 400 to 570 C; 8 to 10 sec; 80 to 150 C; CH4; Pt-SnO2:Sb; Pt/SnO2:Sb thin film gas sensor; cyclic variation; electrical properties; environment temperature variation; humidity; pulsing mode; pulsing temperature; resistance-time profile; sensing properties; time-period; Electrical resistance measurement; Gas detectors; Heating; Humidity; Shape control; Temperature sensors; Testing; Thermal resistance; Thin film sensors; Tin; humidity; sensors of methane; thin films; tin oxide; working temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Control and Communications, 2005. SIBCON '05. IEEE International Siberian Conference on
Print_ISBN
0-7803-9219-1
Type
conf
DOI
10.1109/SIBCON.2005.1611194
Filename
1611194
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