Experimental study on the o2 influences on semiconductor gas sensor responses

This paper studies the influence of environmental O₂ on the semiconductor gas sensor responses experimentally. Both the commercial thick film gas sensors and the lab fabricated micro-hotplate based thin film gas sensors are studied. With the experiments and analysis, all the sensors could be influenced by the environmental O₂ concentration variation. Comparing with their sensitivity to the detected gases (CO or CH₄), the thick film sensors show independent on the O₂ influence when detecting CH₄ , while the influences of O₂ on thick film sensors to CO are large and the influences on thin film sensors are large too, whatever the CO or CH₄ gas