Title :
Design of a novel 2-D silicon piezoresistive flow sensor
Author :
Wei, Ze-Wen ; Qin, Ming ; Huang, Qing-An
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing
Abstract :
Based on silicon direct bonding, SU-8 photoresist process and piezoresistive sensing, a novel 2D non-thermal flow sensor is introduced firstly where a pillar-beam structure converts the flow velocity and direction to deflection of pillar and corresponding deformation of beams. Deformation sensing is accomplished using piezoresistive strain gauges fabricated at the ends of four orthogonal beams. The velocity and direction can be determined from the change of piezoresistances. A Wheatstone bridge is used to get sinusoidal voltage output. The structure deformation of this device was given by FEA methods, and the output voltages were theoretically calculated
Keywords :
finite element analysis; flow sensors; microsensors; photoresists; piezoresistive devices; strain gauges; 2D silicon piezoresistive flow sensor; FEA methods; SU-8 photoresist process; Wheatstone bridge; deformation sensing; nonthermal flow sensor; piezoresistive strain gauges; pillar-beam structure; silicon direct bonding; structure deformation; Capacitive sensors; Drag; Fluid flow measurement; Mechanical sensors; Piezoresistance; Resists; Silicon; Strain measurement; Thermal sensors; Voltage;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306423