DocumentCode
3465518
Title
A novel dry-type glucose sensor based on a metal-oxide-semicoductor capacitor (MOSC) structure with HRP+GOD catalyzing layer
Author
Lin, Jing-Jenn ; Hsu, Po-Yen ; Wu, You-Lin
Author_Institution
Dept. of Electron. Eng., Fortune Junior Coll. of Technol. & Commerce, Kaohsiung
fYear
2006
fDate
Oct. 2006
Firstpage
652
Lastpage
654
Abstract
The paper propose a novel dry-type glucose sensor based on the MOSC structure using a SiO2 gate dielectric in conjunction with an HRP (horseradish peroxidase) + GOD (glucose oxidase) catalyzing layer. The tested glucose solution was dropped directly onto the window opened on the SiO2, with a coating of HRP+GOD catalyzing layer on top of the gate dielectric. From the C-V characteristics of the MOSC found that the glucose solution can induce an inversion layer on the silicon surface causing a gate leakage current flowing along the SiO 2 surface. The gate current changes DeltaI before and after the drop of glucose solution exhibits a near-linear relationship with increasing glucose concentration. The highest linearity occurs when the gate is forward biased at +4V and +5V. The DeltaI sensitivity is about 1.76 nA/cm2/M, and the current is quite stable 20 to 30 min after the drop of the glucose solution
Keywords
MOS capacitors; chemical sensors; dielectric materials; leakage currents; sugar; HRP+GOD catalyzing layer; SiO2; dry-type glucose sensor; gate dielectric; gate leakage current; glucose concentration; glucose oxidase; horseradish peroxidase; metal-oxide-semiconductor capacitor structure; Capacitance-voltage characteristics; Capacitive sensors; Capacitors; Coatings; Dielectrics; Leakage current; Linearity; Silicon; Sugar; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location
Shanghai
Print_ISBN
1-4244-0160-7
Electronic_ISBN
1-4244-0161-5
Type
conf
DOI
10.1109/ICSICT.2006.306426
Filename
4098196
Link To Document