• DocumentCode
    3465518
  • Title

    A novel dry-type glucose sensor based on a metal-oxide-semicoductor capacitor (MOSC) structure with HRP+GOD catalyzing layer

  • Author

    Lin, Jing-Jenn ; Hsu, Po-Yen ; Wu, You-Lin

  • Author_Institution
    Dept. of Electron. Eng., Fortune Junior Coll. of Technol. & Commerce, Kaohsiung
  • fYear
    2006
  • fDate
    Oct. 2006
  • Firstpage
    652
  • Lastpage
    654
  • Abstract
    The paper propose a novel dry-type glucose sensor based on the MOSC structure using a SiO2 gate dielectric in conjunction with an HRP (horseradish peroxidase) + GOD (glucose oxidase) catalyzing layer. The tested glucose solution was dropped directly onto the window opened on the SiO2, with a coating of HRP+GOD catalyzing layer on top of the gate dielectric. From the C-V characteristics of the MOSC found that the glucose solution can induce an inversion layer on the silicon surface causing a gate leakage current flowing along the SiO 2 surface. The gate current changes DeltaI before and after the drop of glucose solution exhibits a near-linear relationship with increasing glucose concentration. The highest linearity occurs when the gate is forward biased at +4V and +5V. The DeltaI sensitivity is about 1.76 nA/cm2/M, and the current is quite stable 20 to 30 min after the drop of the glucose solution
  • Keywords
    MOS capacitors; chemical sensors; dielectric materials; leakage currents; sugar; HRP+GOD catalyzing layer; SiO2; dry-type glucose sensor; gate dielectric; gate leakage current; glucose concentration; glucose oxidase; horseradish peroxidase; metal-oxide-semiconductor capacitor structure; Capacitance-voltage characteristics; Capacitive sensors; Capacitors; Coatings; Dielectrics; Leakage current; Linearity; Silicon; Sugar; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0160-7
  • Electronic_ISBN
    1-4244-0161-5
  • Type

    conf

  • DOI
    10.1109/ICSICT.2006.306426
  • Filename
    4098196