A novel comb electrostatic microrelay with lateral-driven

The purpose of this paper is to present a novel epi-poly process microrelay with two-level comb electrostatic driven, the microrelay has a lateral contact structure, and it is driven by electrostatic actuators. By optimization designing for the structure, A 5 V threshold voltage of the microrelay, depending upon geometrical parameter choices, can be achieved, and using sputtered gold as contact materials, the contact resistance is below 100mOmega. Thus, the electrostatic microrelay is more suitable for the practice application than all previous reports, since the threshold voltage is compatible with the operating voltage of normal electronic circuit