High-sensitivity CMUT with interlayer metal architecture for medical ultrasonic systems

Author

Teng-Chuan Cheng ; Yu-Te Liao ; Tsung-Heng Tsai

Author_Institution

Dept. of Electr. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan

fYear

2015

fDate

21-25 June 2015

Firstpage

1211

Lastpage

1214

Abstract

This paper presents an integration of the capacitive micromachined ultrasonic transducers (CMUTs) and the transimpedance amplifier in medical ultrasound systems. The proposed CMUT and the sensing circuits are both fabricated on the same chip in a 0.18μm CMOS MEMS technology. Two interlayer metal structures are proposed to improve the sensitivity. The CMUTs are designed with 2MHz cells for medical diagnosis. The conversion efficiency of the CMUTs is 4 times and 1.8 times higher than that in the published structures.

Keywords

CMOS analogue integrated circuits; bioMEMS; biomedical transducers; biomedical ultrasonics; microfabrication; CMOS MEMS technology; capacitive micromachined ultrasonic transducers; high-sensitivity CMUT; interlayer metal architecture; medical diagnosis; medical ultrasonic systems; size 0.18 mum; Acoustics; Computer architecture; Electrodes; Metals; Noise; Resonant frequency; Thermal noise; CMUT; TIA; transducer; ultrasonic sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181147

Filename

7181147