Lumped behavioral modeling for suspended MEMS

Author

Guangbao, Shan ; Hailong, WeiH ; Youbao, Liu

Author_Institution

Xi´´an Inst. of Microelectron. Technol.

fYear

2006

fDate

Oct. 2006

Firstpage

679

Lastpage

681

Abstract

A lumped behavioral model of suspended MEMS is presented in the paper. Suspended MEMS device is decomposed into many basal components, each of which is modeled using the relative movement theory and energy method, and its parameterized model coded in Verilog-A is realized. A system-level model of tuning fork gyroscope composed of functional components models is designed and simulated in SABER. Simulation of modal frequency of the gyroscope agrees to within 1% of FEM analysis. The result also indicates that transient analysis of complicated electro-mechanical coupled system is accomplished quickly in this way

Keywords

electromechanical effects; finite element analysis; gyroscopes; hardware description languages; micromechanical devices; transient analysis; vibrations; FEM analysis; SABER; Verilog-A; electromechanical coupled system; lumped behavioral modeling; parameterized model code; suspended MEMS device; system-level model; transient analysis; tuning fork gyroscope; Analytical models; Circuit simulation; Electrostatics; Gyroscopes; Hardware design languages; Kirchhoff´s Law; Microelectromechanical devices; Micromechanical devices; Transducers; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0160-7

Electronic_ISBN

1-4244-0161-5

Type

conf

DOI

10.1109/ICSICT.2006.306435

Filename

4098205