• DocumentCode
    3466038
  • Title

    Development of a sapphire optical wall shear stress sensor for high-temperature applications

  • Author

    Mills, D. ; Blood, D. ; Sheplak, M.

  • Author_Institution
    Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL, USA
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    1295
  • Lastpage
    1298
  • Abstract
    This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.
  • Keywords
    alumina; diffraction gratings; high-speed optical techniques; laser materials processing; metallic thin films; micromachining; moire fringes; optical fibres; platinum; sapphire; sensors; stainless steel; stress measurement; Al2O3; Pt; differential mode; folded tether floating element structure; four-channel alumina fiber array; frequency 1.128 kHz; geometric moire optical transduction; high-temperature applications; initial dynamic calibration; mechanical structures; moire fringe; picosecond pulsed laser micromachining processes; platinum thin-film gratings; sapphire optical wall shear stress sensor; shear stress sensitivity; stainless steel package; theoretical maximum operating temperature; Arrays; Fabrication; Gratings; Optical fiber sensors; Optical fibers; Stress; Substrates; Sapphire; floating element; harsh environment; high-temperature; laser micromachining; microelectromechanical systems; optical; shear stress; skin friction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181168
  • Filename
    7181168