Rapid fabrication of 3D elastomeric structures via laser-machining and vacuum deformation

This paper presents a fabrication technique for creating three-dimensional soft elastomeric structures via a vacuum-assisted auto-shaping process. The structures are fabricated by a planar layer-by-layer fashion using laser machining to define channels and chambers in selected layers. Upon placing in a vacuum, the chambers are evacuated and Parylene is subsequently deposited. When exposed to atmosphere, the structures deform into a pre-determined 3D shape, which is locked in place by the Parylene-C. Curvatures of up to up to 0.04 mm^-1 are achieved using 1.17 mm-thick devices. The structures retain 58% of their curvature for up to 1 h, sufficient for use as temporary soft robotic manipulation tools or pressure-deformable actuators.