Study of Parylene penetration into microchannel

This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass, substrate temperature and channel size on the penetration length, i.e., the length that Parylene can be deposited into the microchannel from the inlet. Understanding the mechanism of Parylene penetration into microchannel helps to develop mass-producible inner surface protection design and process for microfluidic devices.