DocumentCode :
3466342
Title :
Micro welding of aluminum for post process electrode gap reduction using femtosecond laser
Author :
Meinecke, C. ; Muller, M. ; Rennau, M. ; Bertz, A. ; Ebert, R. ; Reuter, D. ; Exner, H. ; Gessner, T.
Author_Institution :
Fac. of Electr. Eng. & Inf. Technol., Tech. Univ. Chemnitz, Chemnitz, Germany
fYear :
2015
fDate :
21-25 June 2015
Firstpage :
1354
Lastpage :
1357
Abstract :
This paper presents a new technology, which allows the reduction of the micro dimensional trench width below the technological limitations of the Deep Reactive Ion Etching (DRIE) process. The high-accuracy and high-throughput femtosecond laser-micro-welding of aluminum was performed for the first time by Micro Electrical Mechanical System (MEMS) fabrication to realize this permanent trench width reduction. Therefore, this technology has been applied for the electrode gap reduction of high precision vibration sensors, based on the capacitive working principle, resulting in a fourfold improvement of the sensitivity without changing the size of the sensor chip itself.
Keywords :
aluminium; laser beam welding; microfabrication; sputter etching; welding; welding electrodes; Al; DRIE process; MEMS fabrication; aluminum; capacitive working principle; deep reactive ion etching; femtosecond laser-microwelding; microdimensional trench width reduction; microelectrical mechanical system; permanent trench width reduction; post process electrode gap reduction; vibration sensors; Aluminum; Capacitive sensors; Electrodes; Micromechanical devices; Microstructure; Welding; Gap Reduction; Micro Electrical Mechanical System (MEMS); laser-micro-welding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
Type :
conf
DOI :
10.1109/TRANSDUCERS.2015.7181183
Filename :
7181183
Link To Document :
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