A 9.5GHz 6ps-Skew Space-Filling-Curve Clock Distribution with 1.8V Full-Swing Standing-Wave Oscillators

Global clock distribution is becoming increasingly difficult for multi-GHz microprocessors because the skew and jitter are proportional to the large latency in the conventional tree structure. A number of resonant techniques have been reported to overcome clock distribution problems. It has a convenient standing-wave mode that separates the low-amplitude segment from the conventional standing wave. The space-filling-curve flexibly distributes the fine clock even to an irregular area. The short latency without hierarchy results in low jitter and low skew. The curve is finally connected to the starting point to obtain a large loop. It reduces the load inductor by half and the reduction reduces the area penalty. The clock distribution network is implemented by employing an interposer. The TLs and the inductors are formed in the interposer and they are connected to the active elements in IC through the micro-bumps.