Title :
Diamond Technology: An Overview - Invited Paper
Author :
Abdel-Motaleb, Ibrahim M.
Author_Institution :
Dept. of Electr. Eng., Northern Illinois Univ., DeKalb, IL
Abstract :
In this paper an overview of diamond technology and its future prospects are presented. Technological problems facing the technology and how it can be addressed will be discussed
Keywords :
diamond; elemental semiconductors; micromechanical devices; MEMS; diamond films; diamond technology; technological problems; Boron; Chemical technology; Chemical vapor deposition; Micromechanical devices; Ohmic contacts; P-n junctions; Paper technology; Plasma applications; Plasma temperature; Schottky diodes;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306528
