Title :
NEMS gas sensors for breakthrough GC multigas analysis systems
Author :
Ollier, E. ; Barattin, R. ; Ladner, C. ; Petitjean, M. ; Bellemin-Comte, A. ; Gouttenoire, V. ; Benedetto, K. ; Salette, A. ; David, N. ; Jousseaume, V. ; Puget, P. ; Duraffourg, L. ; Colinet, Eric
Author_Institution :
LETI, CEA, Grenoble, France
Abstract :
This paper presents NEMS gas sensors implemented in a breakthrough multigas analysis system. The NEMS mass sensors are collectively fabricated, functionalized and packaged at wafer level. NEMS array resonators exhibit good frequency stability (Allan deviation <;5.10-7 in air). After implementation in the multigas analysis system, the capability to analyze complex gas mixtures for Industrial and Indoor Air Quality monitoring has been demonstrated, with typical Limit of Detection in ppm down to ppb level.
Keywords :
air quality; chromatography; frequency stability; gas sensors; nanosensors; Allan deviation; NEMS array resonators; NEMS gas sensors; breakthrough multigas analysis system; detection limit; frequency stability; gas chromatography; indoor air quality monitoring; industrial air quality monitoring; wafer level; Arrays; Gas detectors; Metals; Nanoelectromechanical systems; Resonant frequency; Silicon; NEMS array; NEMS resonator; gas sensor; gravimetric sensor; mass sensor; multigas analysis system;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181205
