DocumentCode

3466929

Title

MEMS & Sensors

Author

Ayazi, Farrokh ; Hagleitner, Christoph

Author_Institution

Georgia Institute of Technology, Atlanta, GA

fYear

2008

fDate

3-7 Feb. 2008

Firstpage

574

Lastpage

575

Keywords

Accelerometers; CMOS process; CMOS technology; Filters; Gyroscopes; Integrated circuit noise; Micromechanical devices; Paper technology; Switches; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International

Conference_Location

San Francisco, CA

Print_ISBN

978-1-4244-2010-0

Electronic_ISBN

978-1-4244-2011-7

Type

conf

DOI

10.1109/ISSCC.2008.4523313

Filename

4523313