Title :
A 1.5μW 1V 2nd-Order ΔΣ Sensor Front-End with Signal Boosting and Offset Compensation for a Capacitive 3-Axis Micro-Accelerometer
Author :
Kämäräinen, Mika ; Paavola, Matti ; Saukoski, Mikko ; Laulainen, Erkka ; Koskinen, Lauri ; Kosunen, Marko ; Halonen, Kari
Author_Institution :
Helsinki Univ. of Technol., Espoo
Abstract :
The paper presents a DeltaSigma sensor for a capacitive micro-accelemeter. The prototype was fabricated with a 0.25 mum CMOS technology with MIM capacitors. The silicon area of the front-end is 0.49 mm2. The chip was combined with an external plusmn2g capacitive 3-axis accelerometer on a PCB.This DeltaSigma sensor front-end IC draws 1.5 muA from a 1V supply while sampling three proof masses, each at 4.096 kS/s.
Keywords :
CMOS integrated circuits; MIM devices; accelerometers; delta-sigma modulation; CMOS technology; MIM capacitor; capacitive 3-axis microaccelerometer; current 1.5 muA; delta-sigma sensor front-end; offset compensation; power 1.5 muW; signal boosting; size 0.25 mum; voltage 1 V; Accelerometers; Boosting; Capacitive sensors; Capacitors; Electrodes; Leakage current; Semiconductor device measurement; Solid state circuits; Switches; Threshold voltage;
Conference_Titel :
Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2010-0
Electronic_ISBN :
978-1-4244-2011-7
DOI :
10.1109/ISSCC.2008.4523315
