A MEMS high-speed rotation measurement system with MCNC fabricated motion and reference sensors using wireless transmission

Author

Sun, Winston ; Tao Mei ; Ho, W.-T. ; Li, Wen J.

Author_Institution

Dept. of Mech. & Autom. Eng., Chinese Univ. of Hong Kong, Shatin, Hong Kong

fYear

1999

fDate

1999

Firstpage

226

Lastpage

231

Abstract

A novel MEMS surface-micromachined non-contact high-speed rotation sensor with total surface area under 4 mm² was developed using the MCNC multi-user MEMS processes. This paper reports the initial characterization of the sensor and presents the results of transmitting the sensor data via various commercial wireless transmission chips. Initial results indicate that this piezoresistive sensor is capable of measuring rotation speeds from 1000 to 4000 rpm with linear output. The responsivity of the sensor is 3 Hz/rpm in this region

Keywords

angular measurement; microsensors; piezoelectric transducers; microsensors; piezoresistive sensor; responsivity; rotation measurement; rotation sensor; wireless transmission; Capacitive sensors; Mechanical sensors; Micromechanical devices; Pollution measurement; Rotation measurement; Semiconductor device measurement; Sensor phenomena and characterization; Sensor systems; Velocity measurement; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Multisensor Fusion and Integration for Intelligent Systems, 1999. MFI '99. Proceedings. 1999 IEEE/SICE/RSJ International Conference on

Conference_Location

Taipei

Print_ISBN

0-7803-5801-5

Type

conf

DOI

10.1109/MFI.1999.815994

Filename

815994