• DocumentCode
    3467007
  • Title

    An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation

  • Author

    Ikehashi, Tamio ; Miyazaki, Takayuki ; Yamazaki, Hiroaki ; Suzuki, Atsushi ; Ogawa, Etsuji ; Miyano, Shinji ; Saito, Tomohiro ; Ohguro, Tatsuya ; Miyagi, Takeshi ; Sugizaki, Yoshiaki ; Otsuka, Nobuaki ; Shibata, Hideki ; Toyoshima, Yoshiaki

  • Author_Institution
    Toshiba, Yokohama
  • fYear
    2008
  • fDate
    3-7 Feb. 2008
  • Firstpage
    582
  • Lastpage
    637
  • Abstract
    We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part of a module with an RF MEMS variable capacitor. No failures are observed over 108 cycles at 85degC, which is an accelerated charging condition.
  • Keywords
    capacitors; driver circuits; micromechanical devices; RF MEMS variable capacitor; circuit implemention; driver integrated circuit; intelligent bipolar actuation; Actuators; Capacitors; Charge pumps; Dielectrics; Intelligent sensors; Micromechanical devices; Parasitic capacitance; Radiofrequency microelectromechanical systems; Switches; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    978-1-4244-2010-0
  • Electronic_ISBN
    978-1-4244-2011-7
  • Type

    conf

  • DOI
    10.1109/ISSCC.2008.4523317
  • Filename
    4523317
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3467007