Title :
An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation
Author :
Ikehashi, Tamio ; Miyazaki, Takayuki ; Yamazaki, Hiroaki ; Suzuki, Atsushi ; Ogawa, Etsuji ; Miyano, Shinji ; Saito, Tomohiro ; Ohguro, Tatsuya ; Miyagi, Takeshi ; Sugizaki, Yoshiaki ; Otsuka, Nobuaki ; Shibata, Hideki ; Toyoshima, Yoshiaki
Author_Institution :
Toshiba, Yokohama
Abstract :
We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part of a module with an RF MEMS variable capacitor. No failures are observed over 108 cycles at 85degC, which is an accelerated charging condition.
Keywords :
capacitors; driver circuits; micromechanical devices; RF MEMS variable capacitor; circuit implemention; driver integrated circuit; intelligent bipolar actuation; Actuators; Capacitors; Charge pumps; Dielectrics; Intelligent sensors; Micromechanical devices; Parasitic capacitance; Radiofrequency microelectromechanical systems; Switches; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2010-0
Electronic_ISBN :
978-1-4244-2011-7
DOI :
10.1109/ISSCC.2008.4523317
