Title :
Single-Chip CMOS Analog Sensor-Conditioning ICs with Integrated Electrically-Adjustable Passive Resistors
Author :
Landsberger, Leslie ; Grudin, Oleg ; Frolov, Gennadiy ; Huang, Zhengrong ; Salman, Saed ; Tsang, Tommy ; Renaud, Mathieu ; Zhang, Bowei
Author_Institution :
Microbridge Technol., Montreal, QC
Abstract :
We demonstrate single-chip analog sensor-conditioning with integrated electrically-adjustable passive resistors, allowing adjustment by the sensor-system assembler, without the drawbacks of digital conditioning. Adding a rudimentary bulk-silicon cavity-etch to a standard 1mum CMOS process enables a group of innovations for thermally-isolated adjustable resistors, called RejustorsTM.
Keywords :
CMOS analogue integrated circuits; resistors; silicon; CMOS analog sensor; Rejustors; analog sensor-conditioning; electrically-adjustable passive resistors; integrated passive resistors; rudimentary bulk-silicon cavity-etch; sensor-system assembler; single chip; thermally-isolated adjustable resistors; Analog circuits; Annealing; CMOS process; Coupling circuits; Gain measurement; Micromechanical devices; Microstructure; Resistors; Semiconductor device measurement; Sensor systems;
Conference_Titel :
Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2010-0
Electronic_ISBN :
978-1-4244-2011-7
DOI :
10.1109/ISSCC.2008.4523319
