Single-Chip CMOS Analog Sensor-Conditioning ICs with Integrated Electrically-Adjustable Passive Resistors

Author

Landsberger, Leslie ; Grudin, Oleg ; Frolov, Gennadiy ; Huang, Zhengrong ; Salman, Saed ; Tsang, Tommy ; Renaud, Mathieu ; Zhang, Bowei

Author_Institution

Microbridge Technol., Montreal, QC

fYear

2008

fDate

3-7 Feb. 2008

Firstpage

586

Lastpage

638

Abstract

We demonstrate single-chip analog sensor-conditioning with integrated electrically-adjustable passive resistors, allowing adjustment by the sensor-system assembler, without the drawbacks of digital conditioning. Adding a rudimentary bulk-silicon cavity-etch to a standard 1mum CMOS process enables a group of innovations for thermally-isolated adjustable resistors, called Rejustors^TM.

Keywords

CMOS analogue integrated circuits; resistors; silicon; CMOS analog sensor; Rejustors; analog sensor-conditioning; electrically-adjustable passive resistors; integrated passive resistors; rudimentary bulk-silicon cavity-etch; sensor-system assembler; single chip; thermally-isolated adjustable resistors; Analog circuits; Annealing; CMOS process; Coupling circuits; Gain measurement; Micromechanical devices; Microstructure; Resistors; Semiconductor device measurement; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International

Conference_Location

San Francisco, CA

Print_ISBN

978-1-4244-2010-0

Electronic_ISBN

978-1-4244-2011-7

Type

conf

DOI

10.1109/ISSCC.2008.4523319

Filename

4523319