Title :
Fabrication of IR Reflectors by Porous Silicon Technique
Author :
Wang, Zhejin ; Wang, Lianwei ; Zheng, Yuxiang ; Xiaoshuang Chen
Author_Institution :
Dept. of Electron., East China Normal Univ., Shanghai
Abstract :
Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated
Keywords :
mirrors; porous semiconductors; refractive index; silicon; IR reflectors; Si; omnidirectional mirrors; oxidation properties; oxidization behavior; porous silicon multilayer structure; reflector structural; refractive index layers; thermal isolation properties; Current density; Etching; Mirrors; Nonhomogeneous media; Optical device fabrication; Optical refraction; Optical variables control; Oxidation; Refractive index; Silicon;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306645
