DocumentCode :
3467994
Title :
Laser ablation forward deposition of metal lines for electrical interconnect repair
Author :
Tatah, Karim ; Fukumoto, Akira ; Thompson, Carl V.
Author_Institution :
Panasonic Technol. Inc., Boston, MA, USA
fYear :
1995
fDate :
2-4 Oct 1995
Firstpage :
176
Lastpage :
178
Abstract :
Flat-panel display interconnect repair requires an open air (vacuum-system-free), environmentally friendly, dry process with a minimum number of steps. The Laser Ablation Forward Deposition (LAFD) approach described in this paper offers such advantages with the potential for low cost. The Laser Ablation Forward Deposition technique transfers metallic film from a glass support to a nearby substrate by laser ablation. This technique can deposit a wide range of metals
Keywords :
flat panel displays; maintenance engineering; metallisation; pulsed laser deposition; air environment; dry process; electrical interconnect repair; flat-panel display; laser ablation forward deposition; metal lines; Chemical lasers; Coatings; Costs; Displays; Gas lasers; Glass; Laser ablation; Laser beams; Optical pulses; Pulsed laser deposition; Silver; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1995. 'Manufacturing Technologies - Present and Future', Seventeenth IEEE/CPMT International
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2996-1
Type :
conf
DOI :
10.1109/IEMT.1995.526111
Filename :
526111
Link To Document :
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