Title :
A fully CMOS-integrated pH-ISFET interface circuit
Author :
Wei, Jinbao ; Yang, Haigang ; Sun, Hongguang ; Lin, Zengjin ; Xia, Shanhong
Author_Institution :
Graduate Sch., Chinese Acad. of Sci., Beijing, China
Abstract :
ISFET is a potentiometric sensor that is easily adapted for a wide range of chemical, biochemical and biomedical measurements. This article presents an ISFET sensor system-on-chip including the ISFET/REFET (reference FET) pair and ISFET/REFET amplifiers, bias current generator, as well as a reference electrode structure, all integrated on the same chip based on CMOS technology. The sensor chip is fabricated in a standard 0.35μm 4-metal and 2-poly layer CMOS process (chartered semiconductor) to which extra post processing steps are added for depositing membranes. The chip operates at 3.3V and the total die area is 5 mm. Finally the performance of the integrated sensor interface circuit is measured and analyzed.
Keywords :
CMOS integrated circuits; chemical sensors; ion sensitive field effect transistors; microsensors; system-on-chip; 0.35 micron; 3.3 V; CMOS integrated circuit; ISFET sensor system-on-chip; biochemical measurements; biomedical measurements; chemical measurements; integrated sensor interface circuit; microsensors; potentiometric sensor; reference electrode structure; Biomedical electrodes; Biomedical measurements; Biosensors; CMOS technology; Chemical and biological sensors; Chemical sensors; Circuits; FETs; Sensor systems; System-on-a-chip; ISFET; Microsensor System Integration; Sensor Interface Circuit; System-on-Chip;
Conference_Titel :
ASIC, 2005. ASICON 2005. 6th International Conference On
Print_ISBN :
0-7803-9210-8
DOI :
10.1109/ICASIC.2005.1611338
