• DocumentCode
    3468285
  • Title

    Fabrication of a thin-film thermal converter with resistive sensing

  • Author

    Di Lillo, L. ; Malatto, L. ; Giménez, G. ; Mangano, E. ; Fraigi, L. ; Laiz, H.

  • Author_Institution
    Inst. Nac. de Tecnol. Ind. (INTI), San Martin, Argentina
  • fYear
    2010
  • fDate
    13-18 June 2010
  • Firstpage
    163
  • Lastpage
    164
  • Abstract
    A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO2). This paper presents details of the fabrication process and materials selection.
  • Keywords
    AC-DC power convertors; resistors; temperature sensors; thermocouples; thin film circuits; vanadium compounds; VO2; heater; material selection; resistive sensing; resistors; thin-film thermal converter fabrication process; Biomembranes; Bridge circuits; Conductivity; Fabrication; Resistors; Silicon; Temperature sensors; Thermal resistance; Transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements (CPEM), 2010 Conference on
  • Conference_Location
    Daejeon
  • Print_ISBN
    978-1-4244-6795-2
  • Type

    conf

  • DOI
    10.1109/CPEM.2010.5543788
  • Filename
    5543788
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3468285