Title :
Fabrication of micro mirror array with hidden joint structures
Author :
Ji, Chang-Hyeon ; Choi, Bum-Kyoo ; Kim, Yong-Kweon
Author_Institution :
Dept. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
Micro mirror arrays with hidden joint structures (pin and staples) are designed and fabricated. In order to achieve a high fill-factor and to remove the problems caused by elastic spring structures, a joint structure is placed under the mirror plate. All the structural components except the titanium electrode are fabricated with thermally evaporated aluminum. Semi-cured photoresist and thick photoresist are used for sacrificial layers. The static characteristics of the micro mirror are measured by applying a voltage difference between the mirror plate and an address electrode
Keywords :
arrays; integrated optics; micromechanical devices; mirrors; optical fabrication; photoresists; Al; Ti; address electrode; elastic spring structures; hidden joint structures; high fill-factor; micro mirror array fabrication; sacrificial layers; semi-cured photoresist; thermally evaporated aluminum; thick photoresist; titanium electrode; Aluminum; Displays; Electrodes; Fabrication; Fasteners; Mirrors; Resists; Shape; Springs; Testing;
Conference_Titel :
Emerging Technologies and Factory Automation Proceedings, 1997. ETFA '97., 1997 6th International Conference on
Conference_Location :
Los Angeles, CA
Print_ISBN :
0-7803-4192-9
DOI :
10.1109/ETFA.1997.616276
