Title :
Pulsed multilevel current drive circuitry with LDMOS for monolithic deformable mirror
Author :
Wu, Tuo ; Chen, Hongyi ; Qian, Dahong
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method
Keywords :
driver circuits; electrostatic actuators; 10 kHz; 8 bit; LDMOS; constant charge drive; electrostatic capacitive microactuator; monolithic deformable mirror; pull-in phenomena; pulsed multilevel current drive; quasistatic precondition; tip-in phenomena; Capacitors; Electrodes; Electrostatics; Equations; Force feedback; Frequency; Microactuators; Mirrors; Pulse circuits; Voltage control;
Conference_Titel :
ASIC, 2005. ASICON 2005. 6th International Conference On
Conference_Location :
Shanghai
Print_ISBN :
0-7803-9210-8
DOI :
10.1109/ICASIC.2005.1611395
