Title :
New types of BAW composite resonators and their properties
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
New configurations of BAW composite resonators and some results of analysis of their possible parameters are presented. It is shown that such structures as “Electrode-Piezodielectric film-Substrate-Electrode” and “Electrode-Piezodielectric film-Substrate-Piezodielectric film-Electrode” may have very high Q factor and easily controllable parallel capacitance and series resistance. The possibility of frequency tuning of the composite resonators consisting of two piezoelectric layers by changing the electric load connected with one of the layers is analyzed
Keywords :
Q-factor; bulk acoustic wave devices; capacitance; crystal resonators; electric impedance; tuning; BAW composite resonators; Q factor; controllable parallel capacitance; electric impedance; electric load; electrode-piezodielectric film-substrate-electrode structure; electrode-piezodielectric film-substrate-piezodielectric film-electrode structure; frequency tuning; parameter analysis; piezoelectric layers; series resistance; Acoustic materials; Acoustic transducers; Capacitance; Electric resistance; Electrodes; Frequency; Impedance; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers;
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2940-6
DOI :
10.1109/ULTSYM.1995.495714
