• DocumentCode
    3469668
  • Title

    Analytical Quantum Modeling of Inversion Charge Density for Nanoscale Undoped Symmetric DG-MOSFETs

  • Author

    Li, Meng ; Yu, Zhiping

  • Author_Institution
    Inst. of Microelectron., Tsinghua Univ., Beijing
  • fYear
    2006
  • fDate
    23-26 Oct. 2006
  • Firstpage
    1361
  • Lastpage
    1363
  • Abstract
    In this work, an analytical model for the integrated inversion charge density in undoped channel for symmetric double-gate (DG-) MOSFETs is developed. Quantum-mechanical effect in the direction normal to the channel is taken into account. Based on the work of Ge (Ge and Fossum, 2002), an expression for the surface potential was established as a function of the integrated inversion charge density Qi. Then an implicit equation is solved for Qi.The results from our analytical model are compared with the published data (Baccarani and Reggiani, 1999 and He et al., 2005). The results from 1D numerical solver Schred, which solves the Poisson´s and Schrodinger equations self-consistently, is taken as standard. The results agree neatly with Schred results for a wide range of silicon film thicknesses, exhibiting its superiority over other existing models
  • Keywords
    MOSFET; Poisson equation; Schrodinger equation; semiconductor device models; surface potential; Poisson equation; Schred; Schrodinger equation; analytical quantum modeling; double-gate MOSFET; inversion charge density; quantum-mechanical effect; surface potential; undoped symmetric DG-MOSFET; Analytical models; Carrier confinement; Eigenvalues and eigenfunctions; MOSFETs; Microelectronics; Numerical simulation; Poisson equations; Schrodinger equation; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0160-7
  • Electronic_ISBN
    1-4244-0161-5
  • Type

    conf

  • DOI
    10.1109/ICSICT.2006.306183
  • Filename
    4098409