Title :
Analytical Quantum Modeling of Inversion Charge Density for Nanoscale Undoped Symmetric DG-MOSFETs
Author :
Li, Meng ; Yu, Zhiping
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
In this work, an analytical model for the integrated inversion charge density in undoped channel for symmetric double-gate (DG-) MOSFETs is developed. Quantum-mechanical effect in the direction normal to the channel is taken into account. Based on the work of Ge (Ge and Fossum, 2002), an expression for the surface potential was established as a function of the integrated inversion charge density Qi. Then an implicit equation is solved for Qi.The results from our analytical model are compared with the published data (Baccarani and Reggiani, 1999 and He et al., 2005). The results from 1D numerical solver Schred, which solves the Poisson´s and Schrodinger equations self-consistently, is taken as standard. The results agree neatly with Schred results for a wide range of silicon film thicknesses, exhibiting its superiority over other existing models
Keywords :
MOSFET; Poisson equation; Schrodinger equation; semiconductor device models; surface potential; Poisson equation; Schred; Schrodinger equation; analytical quantum modeling; double-gate MOSFET; inversion charge density; quantum-mechanical effect; surface potential; undoped symmetric DG-MOSFET; Analytical models; Carrier confinement; Eigenvalues and eigenfunctions; MOSFETs; Microelectronics; Numerical simulation; Poisson equations; Schrodinger equation; Semiconductor films; Silicon;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306183