Electromagnetic simulation on high-frequency solenoid inductors formed by focused-ion-beam stress-introducing technique

Author

Li, Xiao ; Tan, Guo ; Xia, Ling ; Lai, Xihu ; Wu, Wengang

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing

fYear

2006

fDate

Oct. 2006

Firstpage

1386

Lastpage

1388

Abstract

This paper reports the electromagnetic simulation on solenoid-structure inductors for high frequency applications. The components are achieved by the focused-ion-beam stress-introducing technique. The influence of various structure parameters such as the pitch, diameter, number of turns have been analyzed in detail using the Ansoft HFSS simulator. For the inductor with a diameter of about one hundred microns, a wide operation frequency range as well as a maximum quality factor (Q) of 114 can be obtained. For the inductor with a diameter of several hundred nanometers, a maximum Q of more than 7 at THz is predicted

Keywords

Q-factor; focused ion beam technology; inductors; nanotechnology; semiconductor device models; Ansoft HFSS simulator; electromagnetic simulation; focused-ion-beam stress-introducing technique; high-frequency solenoid inductors; quality factor; Eddy currents; Electromagnetic induction; Electromagnetic modeling; Frequency; Inductors; Magnetic flux; Q factor; Solenoids; Spirals; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0160-7

Electronic_ISBN

1-4244-0161-5

Type

conf

DOI

10.1109/ICSICT.2006.306191

Filename

4098417