Title :
Study of various fittings used on bulk chemical supply system
Author :
Chien, C.C. ; Chang, C.N. ; Lien, S.S. ; Hsiao, H.C. ; Tsai, K.T. ; Chang, Y.I.
Author_Institution :
TSMC(Taiwan Semicond. Manuf. Co.), Hsinchu, Taiwan
Abstract :
When selecting a fluoropolymer fitting design to be used in ultra high-purity chemical applications, decision makers must consider different performance characteristics. A recent study was conducted that measured key fitting attributes, such as fitting pull-out force, cleanliness and assembly time. The study compared commercially available nonwetted insert, flare, and wetted insert style fittings. The methodologies employed and the test results are detailed in this paper.
Keywords :
fitting (assembly); polymers; semiconductor industry; assembly time; bulk chemical supply system; cleanliness; flare style fittings; fluoropolymer fitting design; nonwetted insert; pull-out force fitting; semiconductor industry; wetted insert style fittings; Conductivity; Electron tubes; Heating; Joints; Valves; Fitting; Flare; Insert;
Conference_Titel :
e-Manufacturing & Design Collaboration Symposium (eMDC), 2013
Conference_Location :
Hsinchu
DOI :
10.1109/eMDC.2013.6756058
