Efficiency of risk reduction by installation of seismic isolation system for vertical furnace

Author

Komoda, Kazuma ; Yata, Masahiro ; Yamazaki, Yasuyuki ; Ueda, Toshitsugu ; Aono, Sho ; Hibino, Hiroki ; Nagashima, Ichiro ; Izumo, Yoji ; Kikuchi, Takashi

Author_Institution

Taisei Corp., Tokyo, Japan

fYear

2013

fDate

6-6 Sept. 2013

Firstpage

1

Lastpage

4

Abstract

As an efficient measure against the risk of the damage of breakdown of semiconductor manufacturing equipment in particular vertical furnace, seismic isolation system for vertical furnaces was developed. By shaking table tests, it was experimentally confirmed seismic acceleration at vertical furnace was reduced efficiently and the target performance of the seismic isolation system was achieved. Additionally, simulation model was built and analytical simulation of the performance of the seismic isolation system was carried out.

Keywords

dynamic testing; earthquake engineering; furnaces; risk analysis; semiconductor device breakdown; vibration isolation; risk reduction; seismic acceleration; seismic isolation system; semiconductor manufacturing equipment breakdown; shaking table tests; vertical furnace; Acceleration; Displacement measurement; Electron tubes; Length measurement; Rails; Vacuum systems; BCP; Earthquake; Seismic isolator; Vertical furnace;

fLanguage

English

Publisher

ieee

Conference_Titel

e-Manufacturing & Design Collaboration Symposium (eMDC), 2013

Conference_Location

Hsinchu

Type

conf

DOI

10.1109/eMDC.2013.6756062

Filename

6756062