Investigation of SAWs Propagating on the Nano-porous Film

Author

Bai, Mao-Sen ; Xiao, Xia ; Li, Zhi-Guo ; Yao, Su-ying ; Ruan, Gang

Author_Institution

Sch. of Electron. & Inf. Eng., Tianjin Univ.

fYear

2006

fDate

23-26 Oct. 2006

Firstpage

1456

Lastpage

1458

Abstract

This paper established a new layered model to calculate the theoretical dispersion curve of SAWs propagating on the periodic porous SiO₂ film on the Si substrate. In this model the periodic nanoporous SiO₂ film is treated as transversal isotropic structure. Based on this model the properties of SAWs propagating on the surface of periodic porous SiO₂ film in the directions of Si [110] and Si [100] are studied. The investigation on the characteristics of SAWs propagating on the periodic nanoporous film with different porosity, density as well as thickness is performed

Keywords

acoustic wave propagation; dispersion (wave); nanoporous materials; semiconductor thin films; silicon; silicon compounds; surface acoustic waves; Si(100); Si(110); SiO₂; dispersion curve; nanoporous film; surface acoustic waves; transversal isotropic structure; Acoustic measurements; Acoustic waves; Dielectric materials; Periodic structures; Sawing machines; Semiconductor films; Substrates; Surface acoustic waves; Surface fitting; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0160-7

Electronic_ISBN

1-4244-0161-5

Type

conf

DOI

10.1109/ICSICT.2006.306235

Filename

4098439