Title :
A 3-axis surface micromachined /spl Sigma//spl Delta/ accelerometer
Author :
Lemkin, M.A. ; Ortiz, M.A. ; Wongkomet, N. ; Boser, B.E. ; Smith, J.H.
Author_Institution :
California Univ., Berkeley, CA, USA
Abstract :
A monolithic 3-axis surface micromachined accelerometer with capacitive sense and feedback circuitry uses three separate proof masses to measure acceleration. Each proof mass has its own set of interface circuitry, all of which are coordinated by an on-chip master clock. By including x-, y-, and z-axis sensors on one chip, this accelerometer provides a single-chip solution for measuring three ofthe six degrees of freedom needed in an inertial measurement unit. The sensor chip is implemented in 2 /spl mu/m CMOS technology.
Keywords :
CMOS integrated circuits; accelerometers; capacitance measurement; feedback; micromachining; microsensors; sigma-delta modulation; /spl Sigma//spl Delta/ accelerometer; 2 micron; 3-axis surface micromachined accelerometer; 5 V; CMOS sensor chip; capacitive sense circuitry; feedback circuitry; inertial measurement unit; interface circuitry; monolithic accelerometer; onchip master clock; sigma-delta feedback loop; Accelerometers; Micromechanical devices; Monolithic integrated circuits; Solid state circuits; Timing;
Conference_Titel :
Solid-State Circuits Conference, 1997. Digest of Technical Papers. 43rd ISSCC., 1997 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3721-2
DOI :
10.1109/ISSCC.1997.585333
