Title :
Direct bonding of PEN at room temperature by means of surface activated bonding method using nano-adhesion layer
Author :
Matsumae, Takashi ; Fujino, Masahisa ; Suga, Takashi
Author_Institution :
Dept. of Precision Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
We realized the room temperature direct bonding method for polyethylene 2, 6 naphthalene dicarboxylate (polyethylene naphthalate, PEN) film by means of surface activated bonding method using nano-adhesion layer.
Keywords :
bonding processes; polymer films; surface treatment; PEN film; nanoadhesion layer; polyethylene 2, 6 naphthalene dicarboxylate; polyethylene naphthalate film; room temperature direct bonding method; surface activated bonding method; temperature 293 K to 298 K; Bonding; Films; Ion beams; Polymers; Silicon; Surface treatment; Polymer Bonding; Room Temperature Bonding; Surface Activated Bonding;
Conference_Titel :
CPMT Symposium Japan (ICSJ), 2013 IEEE 3rd
Conference_Location :
Kyoto
Print_ISBN :
978-1-4799-2718-0
DOI :
10.1109/ICSJ.2013.6756120
