Title :
DC voltage standard based on square wave excitation of a micromechanical capacitive sensor
Author :
Kaasalainen, J. ; Manninen, A.
Author_Institution :
Centre for Metrol. & Accreditation (MIKES), Espoo, Finland
Abstract :
Long term stability of a DC voltage standard based on a MEMS plate capacitor was investigated. Square wave voltage excitation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle of the apparatus that implements the voltage standard are explained.
Keywords :
capacitive sensors; capacitors; measurement standards; microsensors; stability; voltage measurement; DC voltage standard long term stability; MEMS plate capacitor; capacitor plate surfaces; dielectric layers; micromechanical capacitive sensor; slow charging effect cancellation; square wave voltage excitation; Bridge circuits; Capacitance measurement; Capacitive sensors; Capacitors; Electrostatic measurements; Micromechanical devices; Pi control; Pulse amplifiers; Stability; Voltage control;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
DOI :
10.1109/CPEM.2010.5543949
