DocumentCode
3471585
Title
Survey of semiconductor process-induced damage
fYear
2003
fDate
24-25 April 2003
Firstpage
117
Lastpage
121
Keywords
Computer aided manufacturing; Design engineering; High-K gate dielectrics; Integrated circuit manufacture; Manufacturing processes; Plasma applications; Plasma devices; Plasma materials processing; Power engineering and energy; Reliability engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma- and Process-Induced Damage, 2003 8th International Symposium
Print_ISBN
0-7803-7747-8
Type
conf
DOI
10.1109/PPID.2003.1200936
Filename
1200936
Link To Document