Title :
Advances in wide bandwidth air-coupled capacitance transducers
Author :
Hutchins, D.A. ; Bashford, A.G. ; Wright, W.M.D. ; Schindel, D.W.
Author_Institution :
Dept. of Eng., Warwick Univ., Coventry, UK
Abstract :
Investigations into the field characteristics of an air-coupled ultrasonic capacitance transducer have been performed for a range of transducer configurations. The pressure field of a wide bandwidth silicon backplate capacitance transducer has been scanned in air, and compared to theory based on a plane piston approach. New devices have been fabricated, using laser-machined backplates and an electret film, and are described. The devices have also been used in an air-coupled tomographic imaging experiment
Keywords :
acoustic tomography; capacitance measurement; micromachining; microsensors; pressure transducers; surface acoustic wave transducers; ultrasonic imaging; ultrasonic transducers; Lamb waves; Si; air; air-coupled tomographic imaging experiment; air-coupled ultrasonic capacitance transducer; electret film; field characteristics; laser-machined backplates; plane piston approach; pressure field; transducer configurations; wide bandwidth; wide bandwidth silicon backplate capacitance transducer; Bandwidth; Biomembranes; Capacitance; Frequency; Oscilloscopes; Pistons; Polarization; Pulse amplifiers; Ultrasonic transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2940-6
DOI :
10.1109/ULTSYM.1995.495727
