Advances in wide bandwidth air-coupled capacitance transducers

Author

Hutchins, D.A. ; Bashford, A.G. ; Wright, W.M.D. ; Schindel, D.W.

Author_Institution

Dept. of Eng., Warwick Univ., Coventry, UK

Volume

2

fYear

1995

fDate

7-10 Nov 1995

Firstpage

981

Abstract

Investigations into the field characteristics of an air-coupled ultrasonic capacitance transducer have been performed for a range of transducer configurations. The pressure field of a wide bandwidth silicon backplate capacitance transducer has been scanned in air, and compared to theory based on a plane piston approach. New devices have been fabricated, using laser-machined backplates and an electret film, and are described. The devices have also been used in an air-coupled tomographic imaging experiment

Keywords

acoustic tomography; capacitance measurement; micromachining; microsensors; pressure transducers; surface acoustic wave transducers; ultrasonic imaging; ultrasonic transducers; Lamb waves; Si; air; air-coupled tomographic imaging experiment; air-coupled ultrasonic capacitance transducer; electret film; field characteristics; laser-machined backplates; plane piston approach; pressure field; transducer configurations; wide bandwidth; wide bandwidth silicon backplate capacitance transducer; Bandwidth; Biomembranes; Capacitance; Frequency; Oscilloscopes; Pistons; Polarization; Pulse amplifiers; Ultrasonic transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE

Conference_Location

Seattle, WA

ISSN

1051-0117

Print_ISBN

0-7803-2940-6

Type

conf

DOI

10.1109/ULTSYM.1995.495727

Filename

495727