Title :
Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications
Author :
Songsong Zhang ; Liang Lou ; Tao Wang ; Wei Mong Tsang ; Dim-Lee Kwong ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Various Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications.
Keywords :
blood flow measurement; nanomedicine; nanosensors; nanowires; piezoresistive devices; pressure measurement; pressure sensors; silicon; strain sensors; NEMS sensors; Si; biomedical applications; blood flow measurement; microgrooved diaphragm structure; nanoelectromechanical system; piezoresistive silicon nanowire characterizations; pressure detection; sensing elements; strain detection; ultracompact pressure measurement; Fabrication; Nanoelectromechanical systems; Nanowires; Piezoresistance; Sensor phenomena and characterization; Silicon; Silicon nanowires (SiNWs); blood flow; flow sensor; intraocular pressure (IOP); pressure sensor;
Conference_Titel :
Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO), 2013 IEEE MTT-S International
Conference_Location :
Singapore
DOI :
10.1109/IMWS-BIO.2013.6756159
