Title :
Current State and Prospect of Micro-Machining
Author :
Li, Xiaoxia ; Wang, Jiuhe ; Li, Wen
Author_Institution :
Yanshan Univ., Qinhuangdao
Abstract :
Micro-machining is a delicate process that requires pinpoint accuracy. Researchers in academia and industry worldwide are striving to develop efficient fabrication techniques for features in ranges of a few micrometers and even nanometers. The current leading micro-machining processes are micro drilling, micro milling, and micro turning, micro EDM, micro USM, micro LBM, micro ECM and LIGA. In this paper, the latest advances of diverse micromachining technologies will be discussed. Challenges still exist in fields like innovation in workpiece and tool material, development of auxiliary tooling equipment together with processes combination, etc.
Keywords :
LIGA; electrical discharge machining; electrochemical machining; laser beam machining; machine tools; micromachining; milling; turning (machining); ultrasonic machining; LIGA; laser beam machining; microECM; microEDM; microLBM; microUSM; microdrilling; microelectrochemical machining; microelectrodischarge machining; micromachining; micromilling; microturning; microultrasonic machining; tool material; tooling equipment; Automation; Drilling; Fabrication; Machining; Micromachining; Microstructure; Milling; Rough surfaces; Surface roughness; Turning; Micro-machining; industrial application; machining processes;
Conference_Titel :
Automation and Logistics, 2007 IEEE International Conference on
Conference_Location :
Jinan
Print_ISBN :
978-1-4244-1531-1
DOI :
10.1109/ICAL.2007.4338792
