Title :
MEMS/NEMS based enabling technologies for self-sustained wireless sensor nodes
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) technologies have enabled novel ultracompact sensors. Ranging from various low-power sensors, energy harvesters, to advanced system-in-package (SiP) technology, MEMS and NEMS devices and fabrication technology have proven themselves as indispensable and enabling technologies for realization of the self-sustained wireless sensor nodes. This paper reports the state of the art progress which indicates bright future of self-sustained wireless sensor nodes.
Keywords :
bioMEMS; flow sensors; microsensors; nanomedicine; nanosensors; pressure sensors; wireless sensor networks; MEMS based enabling technologies; NEMS based enabling technologies; energy harvesters; fabrication technology; low-power sensors; microelectromechanical systems; nanoelectromechanical sSystems; self-sustained wireless sensor nodes; system-in-package technology; ultracompact sensors; Micromechanical devices; Nanoelectromechanical systems; Resonant frequency; Robot sensing systems; Vibrations; Wireless communication; Wireless sensor networks; MEMS; NEMS; drug delivery; energy harvesting; flow sensor; pressure sensor;
Conference_Titel :
Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO), 2013 IEEE MTT-S International
Conference_Location :
Singapore
DOI :
10.1109/IMWS-BIO.2013.6756260
