Title :
Microengineered Silicon Pressure Sensors
Author :
Burns, D.W. ; DuPuis, P.
Keywords :
Aerospace industry; Application software; Mechanical sensors; Packaging; Predictive models; Resistors; Sensor systems and applications; Silicon; Temperature sensors; Thermal stresses;
Conference_Titel :
Electro International, 1991
Conference_Location :
New York, NY, USA
DOI :
10.1109/ELECTR.1991.718185
