DocumentCode
3476117
Title
Blowing Polysilicon Fuses: What Conditions are Best?
Author
Li, Yuanjing ; Tang, Andrew
Author_Institution
Analog Devices Inc., Sunnyvale, CA
fYear
2006
fDate
Oct. 16 2006-Sept. 19 2006
Firstpage
194
Lastpage
197
Abstract
A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process
Keywords
electric fuses; blow mechanisms; cross section SEM; electrical waveforms; fuse blow process; optical microscope images; polysilicon fuses; scanning electron microscope images; Current measurement; Electron optics; Fuses; Logic circuits; Optical microscopy; Oscilloscopes; Scanning electron microscopy; Stimulated emission; Thermal stresses; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 2006 IEEE International
Conference_Location
South Lake Tahoe, CA
ISSN
1930-8841
Print_ISBN
1-4244-0296-4
Electronic_ISBN
1930-8841
Type
conf
DOI
10.1109/IRWS.2006.305244
Filename
4098721
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