Title :
A TFT embedded cantilever (CantiFET) platform for sensor applications
Author :
Ray, Priyadip ; Seena, V. ; Rao, Valipe Ramgopal
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
Abstract :
This work focusses on the development of a ZnO based piezo-resistive polymer cantilever sensor platform. Two different approaches have been taken, one based on Al-doped ZnO transistor (TFT) embedded in a polymeric micro-cantilever and another with a ZnO nanowire embedded microcantilever. Low Young´s modulus of SU-8, low process temperature and high strain sensing capability of ZnO makes this platform an attractive option for sensor applications. For both the approaches, electromechanical and mechanical characterization results are reported in this work.
Keywords :
aluminium compounds; cantilevers; micromechanical devices; nanowires; piezoresistive devices; sensors; thin film transistors; zinc compounds; AlZnO; CantiFET platform; SU-8; TFT; electromechanical characterization; high strain sensing capability; low Young modulus; low process temperature; nanowire embedded microcantilever; piezoresistive polymer cantilever sensor platform; polymeric microcantilever; Gold; Logic gates; Nanoscale devices; Nanowires; Performance evaluation; Thin film transistors; Zinc oxide; CantiFET; Microcantilever; Polymer cantilever; SU-8; Sensor; ZnO; piezoresistive;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2013 IEEE International Conference of
Conference_Location :
Hong Kong
DOI :
10.1109/EDSSC.2013.6628191
