Title :
Synthetic and formation mechanism of Cu6Sn5 single-crystal layer on Cu pad for UBM application
Author :
Zhihao Zhang ; Huijun Cao ; Mingyu Li
Author_Institution :
Shenzhen Grad. Sch., Harbin Inst. of Technol., Shenzhen, China
Abstract :
Grain boundaries and/or solder channels between the neighboring Cu6Sn5 grains at the Sn/Cu interface have long been thought to have the negative effects on the interconnect reliability of the solder joints. In this paper, the single-crystal Cu6Sn5 seed is synthesized and then assembled on Cu pad via 1 min reflow at 250°C. By combining the EBSD analysis, the traditional polycrystalline Cu6Sn5 monolayer, which is always generated at the Sn/Cu interface after reflow, has been replaced by a single-crystal monolayer without intergranular structures (solder channels or grain boundaries). The structural reliability of this single-crystal layer is also established by nanoindentation, and the formation mechanism behind this single-crystal-forming procedure is finally confirmed to be a grain boundary migration. This study may deepen the grow behavior of the interfacial Cu6Sn5 phase, and also provide a good starting point for further synthetic of Cu6Sn5 under-bump metallization (UBM) layer.
Keywords :
copper alloys; grain boundaries; integrated circuit metallisation; monolayers; nanoindentation; reflow soldering; Cu pad; Cu6Sn5; EBSD analysis; UBM layer; formation mechanism; grain boundaries; grain boundary migration; interconnect reliability; nanoindentation; polycrystalline Cu6Sn5 monolayer; reflow soldering; single-crystal layer; single-crystal monolayer; single-crystal seed; single-crystal-forming procedure; solder channels; solder joints; structural reliability; synthetic mechanism; temperature 250 C; time 1 min; under-bump metallization layer; Grain boundaries; Joints; Pediatrics; Reliability; Soldering; Tin; Grain boundaries; Grain growth; Intermetallics; Soldering; Under-bump metallization; structure;
Conference_Titel :
Electronic Packaging Technology (ICEPT), 2013 14th International Conference on
Conference_Location :
Dalian
DOI :
10.1109/ICEPT.2013.6756486