Title :
Achieving fast motions in semiconductor manufacturing machinery
Author :
Meckl, Peter H. ; Umemoto, Kazunobu
Author_Institution :
Sch. of Mech. Eng., Purdue Univ., West Lafayette, IN, USA
Abstract :
Many manufacturing devices must execute motions as quickly as possible to achieve profitable high-volume production. This paper develops shaped torque inputs that minimize move time while avoiding overshoot and oscillation. These inputs are applied to an actual semiconductor manufacturing machine, utilizing both feedforward and feedback strategies for minimizing the degree of vibration generated during fast motions
Keywords :
feedback; feedforward; machine tools; motion control; semiconductor device manufacture; three-term control; vibration control; PID control; feedback; feedforward; high-volume production; motion control; semiconductor manufacturing machinery; shaped torque inputs; vibration control; Fasteners; Feedback control; Machinery; Mechanical engineering; Motion control; Production; Semiconductor device manufacture; Torque; Vibrations; Virtual manufacturing;
Conference_Titel :
Control Applications, 1999. Proceedings of the 1999 IEEE International Conference on
Conference_Location :
Kohala Coast, HI
Print_ISBN :
0-7803-5446-X
DOI :
10.1109/CCA.1999.806741
