DocumentCode
3478097
Title
The no-load vacuum eutectic solder die bonding process
Author
Jing Linxiao ; Chen Xianrong ; Feng Xiaocheng ; He Jinchun
Author_Institution
Beijing MXTronics Corp., Beijing, China
fYear
2013
fDate
11-14 Aug. 2013
Firstpage
364
Lastpage
367
Abstract
Eutectic soldering process usually takes with the load own gravity to provide downward force of the chip, the chip closer Solder Lug and die-attach area contact, which inevitably load in contact with the surface of the chip, either "point contact "or "face contact" has placed enormous demands on the cleanliness of the chip surface. however the silicon powder will lead to damage chip in the role of load, and the load surface is easy to stain, lower the yield of eutectic soldering, and very high chip cleanliness is required. Through improve temperature curve and pressure control to achieve a no-load vacuum eutectic soldering die bonding process. Temperature curve can be improved to achieve uniform welding, in order to reduce the voids, make the die-bonding flat, and also need to introduce air pressure control technology to improve the vacuum eutectic soldering quality and product yield. Pressure, atmosphere control method refers to a chip provides a downward pressure through the internal pressure changes to achieve a no-load process. At present, this process has been put into production use for almost a year, all products yield remained at 99.8%, die shear strength are greater than 2 times the standard, the voids rate <;5%, while saving the cost of briquette production significantly improved production yield.
Keywords
eutectic alloys; microassembling; pressure control; semiconductor device manufacture; air pressure control technology; atmosphere control method; briquette production; chip closer Solder Lug; chip surface; die attach area contact; eutectic soldering process; face contact; load surface; no load vacuum eutectic solder die bonding process; point contact; silicon powder; temperature curve; voids; Atmosphere; Cooling; Microassembly; Process control; Soldering; Surface treatment; no load; pressure control; temperature curve; vacuum eutectic solder;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Packaging Technology (ICEPT), 2013 14th International Conference on
Conference_Location
Dalian
Type
conf
DOI
10.1109/ICEPT.2013.6756490
Filename
6756490
Link To Document