Title :
Optimal design of high-sensitivity pressure sensor with peninsula-structured diaphragm
Author :
Xian Huang ; Danqi Zhao ; Jun He ; Fang Yang ; Dacheng Zhang
Author_Institution :
Shenzhen Grad. Sch., Peking Univ., Beijing, China
Abstract :
A novel high-sensitivity pressure sensor with peninsula structured diaphragm was designed to avoid the nonlinearity problem in the area of low pressure sensing. Finite element analysis (FEA) was applied to optimize the sensor design. Sensitivity was improved by nearly 40% by the optimization of piezoresistors in the peninsula. The proposed design exhibited high linearity and high sensitivity synthetically compared with the classical designs based on flat diaphragms.
Keywords :
diaphragms; finite element analysis; piezoresistive devices; pressure sensors; finite element analysis; high-sensitivity pressure sensor; linearity; optimal design; optimization; peninsula-structured diaphragm; piezoresistors; Educational institutions; Loading; Optimization; Piezoresistance; Piezoresistive devices; Sensitivity; Stress; finite element analysis; high sensitivity and linearity; peninsula structure; piezoresistive pressure sensor;
Conference_Titel :
Electron Devices and Solid-State Circuits (EDSSC), 2013 IEEE International Conference of
Conference_Location :
Hong Kong
DOI :
10.1109/EDSSC.2013.6628228
