DocumentCode :
3479230
Title :
Chapter 4, Thermal mechanical behavior on wafer level
fYear :
2004
fDate :
10-12 May 2004
Firstpage :
59
Lastpage :
59
Abstract :
Start of the above-titled section of the conference proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
Conference_Location :
Brussels, Belgium
Print_ISBN :
0-7803-8420-2
Type :
conf
DOI :
10.1109/ESIME.2004.1338166
Filename :
1338166
Link To Document :
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